Shibata, Takayuki
Affiliation | Department of Mechanical Engineering |
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Concurrent post | Center for Diversity and Inclusion Institute for Research on Next-generation Semiconductor and Sensing Science (IRES²) |
Title | Professor |
Fields of Research | Micro/Nanomachining / MEMS/NEMS (Micro/Nano Electro Mechanical System) |
Degree | Ph.D (Hokkaido University) |
Academic Societies | The Japan Society for Precision Engineering (JSPE) / The Japan Society of Mechanical Engineers (JSME) / The Institute of Electrical Engineers of Japan (IEE) / The Surface Finishing Society of Japan (SFSJ) / The Society of Life Support Technology (LST) / J |
shibata@me Please append ".tut.ac.jp" to the end of the address above. |
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Laboratory website URL | http://mems.me.tut.ac.jp/ |
Researcher information URL(researchmap) | Researcher information |
Research
Establishment of interdisciplinary Monodzukuri (manufacturing) basic technology in micro- and nano-scale. Novel micro- and nano-structuring techniques for manufacturing MEMS/NEMS devices, and MEMS-based platform for in vitro manipulation and analysis of living cells for supporting the creation of innovation in life science and biotechnology.
Theme1:Advanced micro- and nano-structuring techniques for MEMS/NEMS devices
Overview
Novel micro- and nano-structuring techniques are proposed for manufacturing MEMS/NEMS devices by employing specific tools fabricated by MEMS technology. These include (1) a novel direct polymer-transfer lithography (DPTL) technique for high-throughput fine patterning, (2) a modified imprinting process using hollow microneedle array for forming through holes in polymers, (3) a diamond probe for an atomic force microscope (AFM) that offers strong advantages not only for standard topographical measurements and the characterization of localized surface properties but also for nanometer-scale lithography and nanostructure fabrication, and (4) a novel nanofabrication technique based on highly localized chemical catalysis by using a catalytically active AFM tip.
Keywords
Theme2:A chip-based system for massively parallel manipulation and analysis of single cells (Cellular MEMS)
Overview
A thorough understanding of cellular functions is a prerequisite for realizing biological applications such as medical diagnostics, drug discovery, and tissue engineering. Therefore, I have been developing novel MEMS devices for massively parallel manipulation and analysis of single cells. These include (1) an array of out-of plane, hollow nanoneedles capable of introducing desired biomolecules (DNA, proteins, etc.) into living cells and extracting biomolecules expressed in the cells, (2) a micromanipulator array capable of massively parallel manipulation of single living cells for 2D/3D cell patterning, (3) a cell culture microdevice actuated by piezoelectric thin film for on-chip regulation of cell functions, and (4) non-damaging measurement system for monitoring cell-shape dynamics based on scanning ion conductance microscopy (SICM).
Keywords
Theme3:Novel scanning probe microscopy techniques for cellular function analysis (Bioprobe)
Overview
With the aim of introducing novel atomic force microscope (AFM) applications to cellular function analysis, I have been developing a newly designed AFM probe (bioprobe): this enables intra- and extra-cellular delivery of biomolecules (DNA, proteins, etc.). Moreover, the bioprobe will provide other useful functions, such as scanning ion conductance microscopy (SICM) for non-damaging imaging of biological cells, and tip-enhanced Raman scattering (TERS) spectroscopy for quantitatively study on dynamic processes inside living cells. Therefore, I can provide a method for correlation analysis of cellular functions with high spatial and temporal resolution.
Keywords
Title of class
Micromachining Engineering (M41630040) / Advanced Production Processes (D51030020)