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Shibata, Takayuki

Affiliation Department of Mechanical Engineering
Title Professor / Director of Venture Business Laboratory
Fields of Research Micro/Nanomachining / MEMS/NEMS (Micro/Nano Electro Mechanical System)
Degree Ph.D (Hokkaido University)
Academic Societies The Japan Society for Precision Engineering (JSPE) / The Japan Society of Mechanical Engineers (JSME) / The Institute of Electrical Engineers of Japan (IEE) / The Surface Finishing Society of Japan (SFSJ) / The Society of Life Support Technology (LST) / J
E-mail shibata@me
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Laboratory website URL
Researcher information URL(researchmap) Researcher information


Establishment of interdisciplinary Monodzukuri (manufacturing) basic technology in micro- and nano-scale. Novel micro- and nano-structuring techniques for manufacturing MEMS/NEMS devices, and MEMS-based platform for in vitro manipulation and analysis of living cells for supporting the creation of innovation in life science and biotechnology.

Theme1:Advanced micro- and nano-structuring techniques for MEMS/NEMS devices

Microimprint techniques for manufacturing microstructures and diamond probe for atomic force microscope.

Novel micro- and nano-structuring techniques are proposed for manufacturing MEMS/NEMS devices by employing specific tools fabricated by MEMS technology. These include (1) a novel direct polymer-transfer lithography (DPTL) technique for high-throughput fine patterning, (2) a modified imprinting process using hollow microneedle array for forming through holes in polymers, (3) a diamond probe for an atomic force microscope (AFM) that offers strong advantages not only for standard topographical measurements and the characterization of localized surface properties but also for nanometer-scale lithography and nanostructure fabrication, and (4) a novel nanofabrication technique based on highly localized chemical catalysis by using a catalytically active AFM tip.


Maskless patterning and structuring, Nanofabrication, Micro/nanoimprint technologies, Direct polymer-transfer lithography, Scanning probe microscopy (SPM)-based nanofabrication, Nanoscale catalytic chemical etching, MEMS

Theme2:A chip-based system for massively parallel manipulation and analysis of single cells (Cellular MEMS)

MEMS-based platform for in vitro manipulation and analysis of living cells for addressing fundamental questions in biological systems.

A thorough understanding of cellular functions is a prerequisite for realizing biological applications such as medical diagnostics, drug discovery, and tissue engineering. Therefore, I have been developing novel MEMS devices for massively parallel manipulation and analysis of single cells. These include (1) an array of out-of plane, hollow nanoneedles capable of introducing desired biomolecules (DNA, proteins, etc.) into living cells and extracting biomolecules expressed in the cells, (2) a micromanipulator array capable of massively parallel manipulation of single living cells for 2D/3D cell patterning, (3) a cell culture microdevice actuated by piezoelectric thin film for on-chip regulation of cell functions, and (4) non-damaging measurement system for monitoring cell-shape dynamics based on scanning ion conductance microscopy (SICM).


Cellular function analysis, Cellomics, Cell manipulation, Cell patterning, Regulation of cellular functions, On-chip cell surgery, Intracellular delivery, Patterned cell culture, Cell-processing system, BioMEMS

Theme3:Novel scanning probe microscopy techniques for cellular function analysis (Bioprobe)

Multi-functional biological scanning probe microscope.

With the aim of introducing novel atomic force microscope (AFM) applications to cellular function analysis, I have been developing a newly designed AFM probe (bioprobe): this enables intra- and extra-cellular delivery of biomolecules (DNA, proteins, etc.). Moreover, the bioprobe will provide other useful functions, such as scanning ion conductance microscopy (SICM) for non-damaging imaging of biological cells, and tip-enhanced Raman scattering (TERS) spectroscopy for quantitatively study on dynamic processes inside living cells. Therefore, I can provide a method for correlation analysis of cellular functions with high spatial and temporal resolution.


Bioimaging of cellular functions, Atomic force microscope (AFM), Nanoneedles, Cellular function analysis, Cell manipulation, Intracellular delivery, Surface enhanced Raman scattering (SERS), BioMEMS

Title of class

Micromachining Engineering (M41630040) / Advanced Production Processes (D51030020)

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