|Affiliation||Department of Mechanical Engineering|
|Title||Professor / Director of Venture Business Laboratory|
|Fields of Research||Micro/Nanomachining / MEMS/NEMS (Micro/Nano Electro Mechanical System)|
|Degree||Ph.D (Hokkaido University)|
|Academic Societies||The Japan Society for Precision Engineering (JSPE) / The Japan Society of Mechanical Engineers (JSME) / The Institute of Electrical Engineers of Japan (IEE) / The Surface Finishing Society of Japan (SFSJ) / The Society of Life Support Technology (LST) / J|
Please append ".tut.ac.jp" to the end of the address above.
|Laboratory website URL||http://mems.me.tut.ac.jp/|
|Researcher information URL（researchmap）||Researcher information|
Establishment of interdisciplinary Monodzukuri (manufacturing) basic technology in micro- and nano-scale. Novel micro- and nano-structuring techniques for manufacturing MEMS/NEMS devices, and MEMS-based platform for in vitro manipulation and analysis of living cells for supporting the creation of innovation in life science and biotechnology.
Theme1：Advanced micro- and nano-structuring techniques for MEMS/NEMS devices
Novel micro- and nano-structuring techniques are proposed for manufacturing MEMS/NEMS devices by employing specific tools fabricated by MEMS technology. These include (1) a novel direct polymer-transfer lithography (DPTL) technique for high-throughput fine patterning, (2) a modified imprinting process using hollow microneedle array for forming through holes in polymers, (3) a diamond probe for an atomic force microscope (AFM) that offers strong advantages not only for standard topographical measurements and the characterization of localized surface properties but also for nanometer-scale lithography and nanostructure fabrication, and (4) a novel nanofabrication technique based on highly localized chemical catalysis by using a catalytically active AFM tip.
Theme2：A chip-based system for massively parallel manipulation and analysis of single cells (Cellular MEMS)
A thorough understanding of cellular functions is a prerequisite for realizing biological applications such as medical diagnostics, drug discovery, and tissue engineering. Therefore, I have been developing novel MEMS devices for massively parallel manipulation and analysis of single cells. These include (1) an array of out-of plane, hollow nanoneedles capable of introducing desired biomolecules (DNA, proteins, etc.) into living cells and extracting biomolecules expressed in the cells, (2) a micromanipulator array capable of massively parallel manipulation of single living cells for 2D/3D cell patterning, (3) a cell culture microdevice actuated by piezoelectric thin film for on-chip regulation of cell functions, and (4) non-damaging measurement system for monitoring cell-shape dynamics based on scanning ion conductance microscopy (SICM).
Theme3：Novel scanning probe microscopy techniques for cellular function analysis (Bioprobe)
With the aim of introducing novel atomic force microscope (AFM) applications to cellular function analysis, I have been developing a newly designed AFM probe (bioprobe): this enables intra- and extra-cellular delivery of biomolecules (DNA, proteins, etc.). Moreover, the bioprobe will provide other useful functions, such as scanning ion conductance microscopy (SICM) for non-damaging imaging of biological cells, and tip-enhanced Raman scattering (TERS) spectroscopy for quantitatively study on dynamic processes inside living cells. Therefore, I can provide a method for correlation analysis of cellular functions with high spatial and temporal resolution.
Title of class
Micromachining Engineering (M41630040) / Advanced Production Processes (D51030020)