Microhotplates for a smart gas sensor
22 Feb 2017
Easy way of fabricating miniature hotplates
Toyohashi University of Technology researchers have developed microhotplates (MHPs), in which an SU-8 photoresist was employed as a supporting material. The MHP can moderate the requirement for the layout design and the process condition of integrated smart gas sensors. Furthermore, the researchers confirmed that the MHP has a good thermal isolation property. It was demonstrated that the hotplate can be heated to 550 °C, and that it operates stably for 100 min.